Vacuum equipment maintenance and repair precautions 1 Maintenance 1.1 Mechanical vacuum pump maintenance and repair: (1) The pump and its surroundings should be kept clean. (2) During the operation of the pump, the oil content in the fuel tank should not be lower than the oil mark center. (3) different types and grades of vacuum pump oil can not be mixed. (4) The temperature rise of the pump can not exceed 70 ℃ in use. (5) The new pump should be used for about 100 h 1 to 2 times the oil, to be replaced within the oil is no longer found with black metal powder, the oil can be extended deadline. According to the instructions and use the actual situation to determine the oil change deadline. (6) The new pump and the repaired pump should be put into operation test 4 ~ 6 h, check whether the pump meets the requirements. (7) After the pump is used for a long time (ranging from 2 to 3 years), the ultimate vacuum will drop, and an overhaul should be carried out. At the same time should also be systems, pipes, valves and motors to be cleaned, overhaul. (8) If the pump is in use, due to system damage or other special accident, or when the air inlet suddenly exposed to the atmosphere, stop the pump as soon as possible and cut off the vacuum pipe connected with the system (close the low vacuum valve or clamp the vacuum clamp) Oil, polluting the workplace. (9) pump all the parts, not absolutely necessary, do not disassemble. (10) Apply a rubber stopper (cap) to the air inlet when the pump is not in use to prevent the stolen and hard objects from falling into the pump. (11) Often pay attention to the development of vacuum technology, try to introduce new technologies, new materials (such as new pump oil, etc.) as early as possible to improve the performance of the original system. The above points, according to the specific circumstances, set out the appropriate operating procedures, strict implementation. 1.2, routine maintenance of the entire equipment: (1) operators should be familiar with all kinds of instruments, pumps, equipment, parts. Read and understand various manuals. (2) Cooling water pressure should be maintained between 0.1 ~ 0.2 Mpa, the water temperature ≤ 45 ℃. (3) compressed air pressure between 0.4 ~ 0.5 Mpa. (4) before starting each furnace, to check the protection of gas cylinder capacity, so as to avoid lack of gas, replace the cylinder. (5) If there is an abnormal situation after power on, it should be immediately excluded or shut down to find out the reason. (6) Often check the return volume of each part, work should ensure that each part has sufficient cooling water. (7) stop using the equipment, the furnace gas should be evacuated for a long time do not have to be filled with protective gas, and equipment, water circulating cooling water let loose. (8) mechanical pump, Roots pump should be regularly refueling refueling, Roots pump oil cup to keep there has been oil. Oil change must be put clean oil. (9) diffusion pump oil change, if any internal oxidation, diffusion pump to be treated within the oxide layer clean, and then replaced with new oil. (10) filled with protective gas, purity should not be less than 99.99%. (11) This device does not allow the use of flammable, explosive and corrosive gases as a protective atmosphere. (12) The surface of the equipment and the surface of the instrument should be kept clean. Wipe the inner wall of the furnace with a cloth with water and non-vacuum oil. (13) Pneumatic three-piece pneumatic system on the oil-water separator to the water often, the vacuum pump should be injected into the oil diffusion pump. (14) The unit voltage of the equipment should be guaranteed in the range of 350 ~ 420V. Three-phase to be balanced. (15) regulation, electrical contact pressure gauge, thermocouple, etc. should always be coated with diffusion pump oil to form a layer of oil film between the seat to prevent air leaks. The above parts and flange connections do not allow long-term use of vacuum sealing mud. (16) Bolts in all parts of the periodic inspection, if found loose, tighten in time. (17) Equipment work, pay attention to observe the display of the instruments, and the sound of the pump in order to detect anomalies in time to identify problems. (18) The use of equipment in the environment, the relative humidity below 85%, the temperature at 10 ~ 40 ℃. In the demolition of equipment, all parts are not allowed to hit with a hammer, sealing surface, seal groove not allowed to scratch. (19) When the equipment is in operation, the operator may not leave the job for a long time.
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